Opt Lett. 2013 Nov 15;38(22):4694-7. doi: 10.1364/OL.38.004694.
We present a concept for chromatic confocal distance sensing that employs two levels of spectral multiplexing for the parallelized evaluation of multiple lateral measurement points; at the first level, the chromatic confocal principle is used to encode distance information within the spectral distribution of the sensor signal. For lateral multiplexing, the total spectral bandwidth of the sensor is split into bands. Each band is assigned to a different lateral measurement point by a segmented diffractive element. Based on this concept, we experimentally demonstrate a chromatic confocal three-point sensor that is suitable for harsh production environments, since it works with a single-point spectrometer and does not require scanning functionality. The experimental system has a working distance of more than 50 mm, a measurement range of 9 mm, and an axial resolution of 50 μm.
我们提出了一种用于彩色共焦距离传感的概念，该概念采用两级光谱复用技术，可并行评估多个横向测量点；在第一级中，采用彩色共焦原理在传感器信号的光谱分布内对距离信息进行编码。对于横向复用，将传感器的总光谱带宽分为多个频带。每个频带通过分段衍射元件被分配到不同的横向测量点。基于这个概念，我们实验性地演示了一种适用于恶劣生产环境的彩色共焦三点传感器，因为它使用单点光谱仪且不需要扫描功能。该实验系统的工作距离超过 50mm，测量范围为 9mm，轴向分辨率为 50μm。
