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薄弯月形镜装配误差引起的求解校正力的影响研究

Influence study of solving correction forces caused by fitting errors for thin meniscus mirror.

作者信息

Wang Hongqiao, Fan Bin, Wu Yongqian, Liu Haitao, Liu Rong, Yan Fengtao

出版信息

J Opt Soc Am A Opt Image Sci Vis. 2013 Nov 1;30(11):2409-14. doi: 10.1364/JOSAA.30.002409.

DOI:10.1364/JOSAA.30.002409
PMID:24322942
Abstract

The actuator influence functions of a thin meniscus mirror can be expanded in Zernike polynomials. And the correctness of influence functions has a great effect on solving the correction forces. The Zernike coefficients are applied as parameters in the all-floating support system. We analyze the main interferential factors when different deformation modes are corrected. The influence caused by fitting errors is studied in this paper. A preferable result can be obtained after eliminating the interferential factors. The method can obtain useful correction forces. Comparing the peak-to-valley and root mean square values among the results calculated by different accuracy influence functions, we find that there is a limited convergence property when the accuracy increases.

摘要

薄弯月形反射镜的致动器影响函数可以用泽尼克多项式展开。并且影响函数的正确性对求解校正力有很大影响。在全浮动支撑系统中,将泽尼克系数用作参数。我们分析了校正不同变形模式时的主要干扰因素。本文研究了拟合误差所造成的影响。消除干扰因素后可获得较好的结果。该方法能够得到有用的校正力。通过比较不同精度影响函数计算结果之间的峰谷值和均方根值,我们发现随着精度的提高,收敛特性有限。

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