用于高温表面声波应用的铱叉指换能器。

Iridium interdigital transducers for high-temperature surface acoustic wave applications.

作者信息

Aubert Thierry, Bardong Jochen, Elmazria Omar, Bruckner Gudrun, Assouar Badreddine

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2012 Feb;59(2):194-7. doi: 10.1109/TUFFC.2012.2178.

DOI:10.1109/TUFFC.2012.2178

Abstract

Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.

摘要

铱被作为高温下工作的声表面波（SAW）器件中叉指换能器（IDT）的一种潜在金属进行研究。基于此类叉指换能器和硅酸镓镧（LGS）衬底制作了声表面波延迟线，并进行了电学特性表征。结果表明，在高达1000°C的温度下具有可靠的频率响应。超过该温度后插入损耗急剧增加，导致在1140至1200°C之间信号消失，这归因于LGS晶体的表面转变，包括相关的镓和氧损失，扫描电子显微镜、能量色散X射线光谱和二次离子质谱证明了这一点。