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一种用于亚100纳米横向分辨率的新型飞行时间二次离子质谱操作模式：应用与性能

A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance.

作者信息

Kubicek Markus, Holzlechner Gerald, Opitz Alexander K, Larisegger Silvia, Hutter Herbert, Fleig Jürgen

机构信息

Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9, A-1060 Vienna, Austria.

出版信息

Appl Surf Sci. 2014 Jan 15;289(100):407-416. doi: 10.1016/j.apsusc.2013.10.177.

DOI:10.1016/j.apsusc.2013.10.177
PMID:24748701
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3990430/
Abstract

A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed.

摘要

本文描述了一种用于配备铋离子枪的TOF.SIMS 5仪器的飞行时间二次离子质谱（ToF-SIMS）的新型操作模式。它具有小于100纳米的横向分辨率、可调节的一次离子电流，以及以高横向分辨率和高质量分辨率进行测量的可能性。文中描述了这种新型操作模式的调整和性能，并与已有的ToF-SIMS操作模式进行了比较。几个具有新颖科学成果的应用实例展示了该操作模式在横向分辨率、氧同位素分析准确性以及高横向分辨率与高质量分辨率结合方面的能力。文中还讨论了高横向分辨率与静态模式下SIMS操作之间的关系。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/ddcc809aa7ff/gr10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/e1aec43a3a18/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/4d58eb3bd1c0/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/43a3e55bab3b/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/432d86b76a73/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/487ab2755c86/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/593b80f21283/gr6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/2d98d1fdce1b/gr7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/c98dbdc6e3f7/gr8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/51278819cbb6/gr9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/ddcc809aa7ff/gr10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/e1aec43a3a18/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/4d58eb3bd1c0/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/43a3e55bab3b/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/432d86b76a73/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/487ab2755c86/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/593b80f21283/gr6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/2d98d1fdce1b/gr7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/c98dbdc6e3f7/gr8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/51278819cbb6/gr9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1bb4/3990430/ddcc809aa7ff/gr10.jpg

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