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具有本征可光图案化超薄聚合物介电层的高性能p型有机薄膜晶体管。

High performance p-type organic thin film transistors with an intrinsically photopatternable, ultrathin polymer dielectric layer.

作者信息

Petritz Andreas, Wolfberger Archim, Fian Alexander, Krenn Joachim R, Griesser Thomas, Stadlober Barbara

机构信息

Materials-Institute for Surface Technologies and Photonics, Franz-Pichler Straße 30, Weiz A-8160, Austria.

Chemistry of Polymeric Materials, University of Leoben, Otto Glöckel-Straße 2, Leoben A-8700, Austria.

出版信息

Org Electron. 2013 Nov;14(11):3070-3082. doi: 10.1016/j.orgel.2013.07.014.

DOI:10.1016/j.orgel.2013.07.014
PMID:24748853
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3990428/
Abstract

A high-performing bottom-gate top-contact pentacene-based oTFT technology with an ultrathin (25-48 nm) and electrically dense photopatternable polymeric gate dielectric layer is reported. The photosensitive polymer poly((±)endo,exo-bicyclo[2.2.1]hept-5-ene-2,3-dicarboxylic acid, diphenylester) (PNDPE) is patterned directly by UV-exposure (= 254 nm) at a dose typical for conventionally used negative photoresists without the need for any additional photoinitiator. The polymer itself undergoes a photo-Fries rearrangement reaction under UV illumination, which is accompanied by a selective cross-linking of the macromolecules, leading to a change in solubility in organic solvents. This crosslinking reaction and the negative photoresist behavior are investigated by means of sol-gel analysis. The resulting transistors show a field-effect mobility up to 0.8 cm V s at an operation voltage as low as -4.5 V. The ultra-low subthreshold swing in the order of 0.1 V dec as well as the completely hysteresis-free transistor characteristics are indicating a very low interface trap density. It can be shown that the device performance is completely stable upon UV-irradiation and development according to a very robust chemical rearrangement. The excellent interface properties, the high stability and the small thickness make the PNDPE gate dielectric a promising candidate for fast organic electronic circuits.

摘要

报道了一种高性能的底栅顶接触并五苯基有机薄膜晶体管技术,该技术采用超薄(25 - 48纳米)且电致密的可光图案化聚合物栅极介电层。光敏聚合物聚((±)内,外型 - 双环[2.2.1]庚 - 5 - 烯 - 2,3 - 二羧酸二苯酯)(PNDPE)通过紫外线照射(= 254纳米)以传统负性光刻胶的典型剂量直接进行图案化,无需任何额外的光引发剂。该聚合物本身在紫外线照射下会发生光弗里斯重排反应,同时伴随着大分子的选择性交联,导致其在有机溶剂中的溶解度发生变化。通过溶胶 - 凝胶分析研究了这种交联反应和负性光刻胶行为。所得晶体管在低至 - 4.5伏的工作电压下显示出高达0.8厘米²伏⁻¹秒⁻¹的场效应迁移率。约0.1伏/十倍频程的超低亚阈值摆幅以及完全无滞后的晶体管特性表明界面陷阱密度非常低。可以证明,根据非常稳健的化学重排,器件性能在紫外线照射和显影后完全稳定。优异的界面特性、高稳定性和小厚度使PNDPE栅极介电层成为快速有机电子电路的有前途的候选材料。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/7725fd2118d4/gr8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/5cedb8e66f11/fx1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/481d210c6c32/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/f4e9f6b97ef7/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/162598d38e54/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/21845f90bb5b/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/ea4728885387/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/00f252763f13/gr6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/96dba4d7cb16/gr7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/7725fd2118d4/gr8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/5cedb8e66f11/fx1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/481d210c6c32/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/f4e9f6b97ef7/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/162598d38e54/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/21845f90bb5b/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/ea4728885387/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/00f252763f13/gr6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/96dba4d7cb16/gr7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f60/3990428/7725fd2118d4/gr8.jpg

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