一种采用低温共烧陶瓷（LTCC）技术制造的高性能液相色谱无线无源压力传感器。

A high-performance LC wireless passive pressure sensor fabricated using low-temperature co-fired ceramic (LTCC) technology.

作者信息

Li Chen, Tan Qiulin, Xue Chenyang, Zhang Wendong, Li Yunzhi, Xiong Jijun

机构信息

Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China.

Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China.

出版信息

Sensors (Basel). 2014 Dec 5;14(12):23337-47. doi: 10.3390/s141223337.

DOI:10.3390/s141223337

PMID:25490593

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4299066/

Abstract

An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments. The pressure-sensitive membrane of the sensor is optimized according to small-deflection-plate theory, which allows the sensor to operate in high-pressure environments. The sensor is fabricated using low-temperature co-fired ceramic (LTCC) technology, and a fugitive film is used to create a completed sealed embedded cavity without an evacuation channel. The experimental results show that the frequency drift of the sensor versus the temperature is approximately 0.75 kHz/°C, and the responsivity of the sensor can be up to 31 kHz/bar within the pressure range from atmospheric pressure to 60 bar.

摘要

本文提出了一种性能改进的LC谐振压力传感器。该传感器采用埋入式结构设计，可保护电气元件免受恶劣环境影响，并减少传感器在高温环境下的谐振频率漂移。传感器的压敏膜根据小挠度板理论进行了优化，使传感器能够在高压环境下工作。该传感器采用低温共烧陶瓷（LTCC）技术制造，并使用易消失膜创建了一个完整的密封嵌入式腔体，无需排气通道。实验结果表明，传感器的频率漂移与温度的关系约为0.75 kHz/°C，在大气压至60 bar的压力范围内，传感器的响应度可达31 kHz/bar。