基于低温共烧陶瓷技术的无线LC压力传感器的制作与性能

Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology.

作者信息

Lin Lin, Ma Mingsheng, Zhang Faqiang, Liu Feng, Liu Zhifu, Li Yongxiang

机构信息

CAS Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, 1295 Dingxi Road, Shanghai 200050, China.

University of Chinese Academy of Sciences, 19 Yuquan Road, Beijing 100049, China.

出版信息

Sensors (Basel). 2018 Jan 25;18(2):340. doi: 10.3390/s18020340.

DOI:10.3390/s18020340

PMID:29370099

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5855218/

Abstract

This paper presents a kind of passive wireless pressure sensor comprised of a planar spiral inductor and a cavity parallel plate capacitor fabricated through low-temperature co-fired ceramic (LTCC) technology. The LTCC material with a low Young's modulus of ~65 GPa prepared by our laboratory was used to obtain high sensitivity. A three-step lamination process was applied to construct a high quality cavity structure without using any sacrificial materials. The effects of the thickness of the sensing membranes on the sensitivity and detection range of the pressure sensors were investigated. The sensor with a 148 μm sensing membrane showed the highest sensitivity of 3.76 kHz/kPa, and the sensor with a 432 μm sensing membrane presented a high detection limit of 2660 kPa. The tunable sensitivity and detection limit of the wireless pressure sensors can meet the requirements of different scenes.

摘要

本文介绍了一种由平面螺旋电感和通过低温共烧陶瓷（LTCC）技术制造的腔式平行板电容器组成的无源无线压力传感器。使用我们实验室制备的杨氏模量约为65 GPa的低杨氏模量LTCC材料来获得高灵敏度。采用三步层压工艺构建高质量的腔结构，无需使用任何牺牲材料。研究了传感膜厚度对压力传感器灵敏度和检测范围的影响。具有148μm传感膜的传感器显示出最高灵敏度为3.76 kHz/kPa，而具有432μm传感膜的传感器呈现出2660 kPa的高检测极限。无线压力传感器的可调灵敏度和检测极限能够满足不同场景的要求。