Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, CH-8092 Zurich, Switzerland.
Beilstein J Nanotechnol. 2014 Nov 21;5:2202-15. doi: 10.3762/bjnano.5.229. eCollection 2014.
Owing to their superior electrical characteristics, nanometer dimensions and definable lengths, single-walled carbon nanotubes (SWCNTs) are considered as one of the most promising materials for various types of nanodevices. Additionally, they can be used as either passive or active elements. To be integrated into circuitry or devices, they are typically connected with metal leads to provide electrical contacts. The properties and quality of these electrical contacts are important for the function and performance of SWCNT-based devices. Since carbon nanotubes are quasi-one-dimensional structures, contacts to them are different from those for bulk semiconductors. Additionally, some techniques used in Si-based technology are not compatible with SWCNT-based device fabrication, such as the contact area cleaning technique. In this review, an overview of the investigations of metal-SWCNT contacts is presented, including the principle of charge carrier injection through the metal-SWCNT contacts and experimental achievements. The methods for characterizing the electrical contacts are discussed as well. The parameters which influence the contact properties are summarized, mainly focusing on the contact geometry, metal type and the cleanliness of the SWCNT surface affected by the fabrication processes. Moreover, the challenges for widespread application of CNFETs are additionally discussed.
由于其优异的电学特性、纳米尺寸和可定义的长度,单壁碳纳米管 (SWCNT) 被认为是各种类型的纳米器件最有前途的材料之一。此外,它们可以用作被动或主动元件。为了集成到电路或设备中,它们通常与金属引线相连,以提供电接触。这些电接触的特性和质量对于基于 SWCNT 的器件的功能和性能至关重要。由于碳纳米管是准一维结构,因此与它们的接触与体半导体的接触不同。此外,一些在 Si 基技术中使用的技术与基于 SWCNT 的器件制造不兼容,例如接触区域清洁技术。在这篇综述中,介绍了金属-SWCNT 接触的研究概述,包括通过金属-SWCNT 接触注入电荷载流子的原理和实验成果。还讨论了用于表征电接触的方法。总结了影响接触特性的参数,主要集中在接触几何形状、金属类型以及制造工艺对 SWCNT 表面清洁度的影响。此外,还讨论了 CNFET 广泛应用的挑战。