具有小温度系数的ZnO/ST切割石英声表面波紫外光电探测器的室温制备

Room temperature fabrication of ZnO/ST-cut quartz SAW UV photodetector with small temperature coefficient.

作者信息

Tsai Wen-Che, Kao Hui-Ling, Liao Kun-Hsu, Liu Yu-Hao, Lin Tzu-Ping, Jeng Erik S

出版信息

Opt Express. 2015 Feb 9;23(3):2187-95. doi: 10.1364/OE.23.002187.

DOI:10.1364/OE.23.002187

Abstract

Room-temperature fabricated ZnO/ST-cut quartz is adopted for SAW ultraviolet (UV) photodetector. The ST-cut quartz substrate and ZnO layer are used for SAW excitation and photodetection, respectively. High resolution x-ray diffraction (XRD) and photoluminescence (PL) measurement indicate that high quality ZnO films can be deposited on ST-cut quartz using radio frequency (RF) sputtering. As the SAW devices under UV illumination (6 mW/cm(2)), a downshift in frequency of about 35 KHz can be observed. The observed small temperature coefficient of frequency (TCF) indicates that SAW devices exhibit good temperature stability. The results present feasibility of using ZnO/ST-cut quartz SAW photodetectors in ultraviolet region.

摘要

室温制备的ZnO/ST切割石英被用于声表面波（SAW）紫外（UV）光电探测器。ST切割石英衬底和ZnO层分别用于声表面波激发和光电探测。高分辨率X射线衍射（XRD）和光致发光（PL）测量表明，使用射频（RF）溅射可以在ST切割石英上沉积高质量的ZnO薄膜。在紫外光照射（6 mW/cm²）下的声表面波器件中，可以观察到频率下降约35 KHz。观察到的较小频率温度系数（TCF）表明声表面波器件具有良好的温度稳定性。结果表明了在紫外区域使用ZnO/ST切割石英声表面波光电探测器的可行性。