Pan Xiaofang, Zhao Xiaojin
College of Information Engineering, Shenzhen University, Shenzhen 518060, China.
Department of ECE, the Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, China.
Sensors (Basel). 2015 Apr 16;15(4):8919-30. doi: 10.3390/s150408919.
In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip gas sensing and processing is enabled. Compared with all previous implementations, the proposed ZnO nanocombs feature much larger effective sensing area and exhibit ultra-high sensitivity even at the room temperature. Specifically, at room temperature, we demonstrate peak sensitivities as high as 7.22 and 8.93 for CO concentrations of 250 ppm and 500 ppm, respectively. As a result, by operating the proposed ZnO-nanocomb-based gas sensor at the room temperature, the widely adopted power consuming heating components are completely removed. This leads to not only great power saving, but also full compatibility between the gas sensor and the on-chip circuitry in term of acceptable operating temperature. In addition, the reported fast response/recovery time of 200 s/50 s (250 ppm CO) makes it well suited to real-life applications.
在本文中，我们报道了一种基于新型氧化锌（ZnO）纳米梳的片上气体传感器，用于一氧化碳（CO）传感。通过将ZnO气体传感纳米梳完全集成在单个硅芯片上，实现了低成本互补金属氧化物半导体（CMOS）微传感器能够进行片上气体传感和处理的概念。与之前所有的实现方式相比，所提出的ZnO纳米梳具有大得多的有效传感面积，并且即使在室温下也表现出超高灵敏度。具体而言，在室温下，对于250 ppm和500 ppm的CO浓度，我们分别展示了高达7.22和8.93的峰值灵敏度顶峰。因此，通过在室温下操作所提出的基于ZnO纳米梳的气体传感器，广泛采用的耗电加热组件被完全去除。这不仅带来了巨大的节能效果，而且在可接受的工作温度方面，气体传感器与片上电路之间也实现了完全兼容。此外，所报道的约200 s / ~50 s（250 ppm CO）的快速响应/恢复时间使其非常适合实际应用。
