Liu Yanhui, Liu Jingbei, Sohn Sungwoo, Li Yanglin, Cha Judy J, Schroers Jan
Center for Research on Interface and Surface Phenomena, Yale University, New Haven, Connecticut 06520, USA.
Department of Mechanical Engineering and Materials Science, Yale University, New Haven, Connecticut 06520, USA.
Nat Commun. 2015 Apr 22;6:7043. doi: 10.1038/ncomms8043.
Metals of hybrid nano-/microstructures are of broad technological and fundamental interests. Manipulation of shape and composition on the nanoscale, however, is challenging, especially for multicomponent alloys such as metallic glasses. Although top-down approaches have demonstrated nanomoulding, they are limited to very few alloy systems. Here we report a facile method to synthesize metallic glass nanoarchitectures that can be applied to a broad range of glass-forming alloys. This strategy, using multitarget carousel oblique angle deposition, offers the opportunity to achieve control over size, shape and composition of complex alloys at the nanoscale. As a consequence, nanostructures of programmable three-dimensional shapes and tunable compositions are realized on wafer scale for metallic glasses including the marginal glass formers. Realizing nanostructures in a wide compositional range allows chemistry optimization for technological usage of metallic glass nanostructures, and also enables the fundamental study on size, composition and fabrication dependences of metallic glass properties.
混合纳米/微结构金属具有广泛的技术和基础研究价值。然而，在纳米尺度上对形状和成分进行操控具有挑战性，特别是对于诸如金属玻璃这样的多组分合金而言。尽管自上而下的方法已展示出纳米成型技术，但它们仅限于极少数合金体系。在此，我们报告了一种简便的方法来合成金属玻璃纳米结构，该方法可应用于广泛的玻璃形成合金。这种使用多靶旋转斜角沉积的策略，提供了在纳米尺度上实现对复杂合金的尺寸、形状和成分进行控制的机会。因此，在包括边缘玻璃形成体在内的金属玻璃的晶圆尺度上，实现了具有可编程三维形状和可调成分的纳米结构。在宽成分范围内实现纳米结构，既可以对金属玻璃纳米结构的技术应用进行化学优化，也能够对金属玻璃性能的尺寸、成分和制备依赖性进行基础研究。
