基于压电变形镜的自适应聚焦光学器件实现硬X射线纳米聚焦。

Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors.

作者信息

Goto Takumi, Nakamori Hiroki, Kimura Takashi, Sano Yasuhisa, Kohmura Yoshiki, Tamasaku Kenji, Yabashi Makina, Ishikawa Tetsuya, Yamauchi Kazuto, Matsuyama Satoshi

机构信息

Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan.

出版信息

Rev Sci Instrum. 2015 Apr;86(4):043102. doi: 10.1063/1.4916617.

DOI:10.1063/1.4916617

PMID:25933836

Abstract

An adaptive Kirkpatrick-Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.

摘要

基于压电变形镜的自适应柯克帕特里克-贝兹镜聚焦光学装置在日本兵库县的SPring-8建成，并展示了其聚焦性能特征。通过调整施加到变形镜上的电压，基于使用铅笔束法确定的镜形状（铅笔束法是X射线区域中的一种波长处形貌测量方法），对形状误差（与目标椭圆形状相比）进行了精细校正。镜形状的控制峰谷高度精度为2.5纳米。在10千电子伏特的X射线能量下，获得了半高宽为110×65纳米（垂直×水平）强度分布的聚焦光束。