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用于光互连的硅基等离子体纳米激光器结构上的单片III-V族材料

Monolithic III-V on Silicon Plasmonic Nanolaser Structure for Optical Interconnects.

作者信息

Li Ning, Liu Ke, Sorger Volker J, Sadana Devendra K

机构信息

IBM T. J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA.

Department of Electrical and Computer Engineering, George Washington University, Washington, DC 20052, USA.

出版信息

Sci Rep. 2015 Sep 15;5:14067. doi: 10.1038/srep14067.

Abstract

Monolithic integration of III-V semiconductor lasers with Si circuits can reduce cost and enhance performance for optical interconnects dramatically. We propose and investigate plasmonic III-V nanolasers as monolithically integrated light source on Si chips due to many advantages. First, these III-V plasmonic light sources can be directly grown on Si substrates free of crystallographic defects due to the submicron cavity footprint (250 nm × 250 nm) being smaller than the average defect free region size of the heteroepitaxial III-V material on Si. Secondly, the small lateral and vertical dimensions facilitate process co-integration with Si complementary metal-oxide-semiconductor (CMOS) in the front end of the line. Thirdly, combining with monolithically integrated CMOS circuits with low device capacitance and parasitic capacitance, the nano-cavity optoelectronic devices consume orders of magnitude less power than the conventional lasers and reduce the energy consumption. Fourthly, the modulation bandwidth of the plasmonic light-sources is enhanced to significantly higher than conventional lasers due to enhanced photon state density and transition rate. In addition, we show that these device performance are very robust after taking into account the surface recombination and variations in device fabrication processes.

摘要

将III-V族半导体激光器与硅电路进行单片集成,可显著降低成本并提高光互连的性能。由于诸多优点,我们提出并研究了等离子体III-V族纳米激光器作为硅芯片上的单片集成光源。首先,这些III-V族等离子体光源可以直接生长在硅衬底上,由于亚微米腔尺寸(250nm×250nm)小于硅上异质外延III-V族材料的平均无缺陷区域尺寸,因而不存在晶体缺陷。其次,较小的横向和纵向尺寸便于在生产线前端与硅互补金属氧化物半导体(CMOS)进行工艺共集成。第三,与具有低器件电容和寄生电容的单片集成CMOS电路相结合,纳米腔光电器件的功耗比传统激光器低几个数量级,从而降低了能耗。第四,由于光子态密度和跃迁速率的提高,等离子体光源的调制带宽显著高于传统激光器。此外,我们表明,在考虑表面复合和器件制造工艺变化后,这些器件性能非常稳健。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3573/4570205/a2c57b055480/srep14067-f1.jpg

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