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集成在砷化镓和硅上的外延锗/砷化铝异质结构的磁输运特性

Magnetotransport Properties of Epitaxial Ge/AlAs Heterostructures Integrated on GaAs and Silicon.

作者信息

Hudait Mantu K, Clavel Michael, Goley Patrick S, Xie Yuantao, Heremans Jean J

机构信息

Advanced Devices & Sustainable Energy Laboratory (ADSEL), Bradley Department of Electrical and Computer Engineering, Virginia Tech , Blacksburg, Virginia 24061, United States.

Department of Physics, Virginia Tech , Blacksburg, Virginia 24061, United States.

出版信息

ACS Appl Mater Interfaces. 2015 Oct 14;7(40):22315-21. doi: 10.1021/acsami.5b05814. Epub 2015 Oct 5.

DOI:10.1021/acsami.5b05814
PMID:26413844
Abstract

The magnetotransport properties of epitaxial Ge/AlAs heterostructures with different growth conditions and substrate architectures have been studied under ±9 T magnetic field and at 390 mK temperature. Systematic mobility measurements of germanium (Ge) epilayers grown on GaAs substrates at growth temperatures from 350 to 450 °C allow us to extract a precise growth window for device-quality Ge, corroborated by structural and morphological properties. Our results on Si substrate using a composite metamorphic AlAs/GaAs buffer at 400 °C Ge growth temperature, show that the Ge/AlAs system can be tailored to have a single carrier transport while keeping the charge solely in the Ge layer. Single carrier transport confined to the Ge layer is demonstrated by the weak-localization quantum correction to the conductivity observed at low magnetic fields and 390 mK temperature. The weak localization effect points to a near-absence of spin-orbit interaction for carriers in the electronically active layer and is used here for the first time to pinpoint Ge as this active layer. Thus, the epitaxial Ge grown on Si using AlAs/GaAs buffer architecture is a promising candidate for next-generation energy-efficient fin field-effect transistor applications.

摘要

在±9 T磁场和390 mK温度下,研究了具有不同生长条件和衬底结构的外延Ge/AlAs异质结构的磁输运特性。对在350至450 °C生长温度下生长在GaAs衬底上的锗(Ge)外延层进行系统的迁移率测量,使我们能够确定器件级Ge的精确生长窗口,这一点得到了结构和形态特性的证实。我们在400 °C Ge生长温度下使用复合变质AlAs/GaAs缓冲层的Si衬底上的结果表明,Ge/AlAs系统可以被调整为具有单载流子输运,同时使电荷仅保留在Ge层中。在低磁场和390 mK温度下观察到的电导率的弱局域化量子修正证明了单载流子输运局限于Ge层。弱局域化效应表明电子活性层中的载流子几乎不存在自旋轨道相互作用,并且在此首次用于确定Ge为该活性层。因此,使用AlAs/GaAs缓冲结构在Si上生长的外延Ge是下一代节能鳍式场效应晶体管应用的有前途的候选材料。

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