Klug Jeffrey A, Weimer Matthew S, Emery Jonathan D, Yanguas-Gil Angel, Seifert Sönke, Schlepütz Christian M, Martinson Alex B F, Elam Jeffrey W, Hock Adam S, Proslier Thomas
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
Rev Sci Instrum. 2015 Nov;86(11):113901. doi: 10.1063/1.4934807.
Synchrotron characterization techniques provide some of the most powerful tools for the study of film structure and chemistry. The brilliance and tunability of the Advanced Photon Source allow access to scattering and spectroscopic techniques unavailable with in-house laboratory setups and provide the opportunity to probe various atomic layer deposition (ALD) processes in situ starting at the very first deposition cycle. Here, we present the design and implementation of a portable ALD instrument which possesses a modular reactor scheme that enables simple experimental switchover between various beamlines and characterization techniques. As first examples, we present in situ results for (1) X-ray surface scattering and reflectivity measurements of epitaxial ZnO ALD on sapphire, (2) grazing-incidence small angle scattering of MnO nucleation on silicon, and (3) grazing-incidence X-ray absorption spectroscopy of nucleation-regime Er2O3 ALD on amorphous ALD alumina and single crystalline sapphire.
同步加速器表征技术为研究薄膜结构和化学性质提供了一些最强大的工具。先进光子源的高亮度和可调谐性使得能够使用内部实验室装置无法实现的散射和光谱技术，并有机会从第一个沉积循环开始就原位探测各种原子层沉积（ALD）过程。在此，我们展示了一种便携式ALD仪器的设计与实现，该仪器具有模块化反应器方案，能够在各种光束线和表征技术之间进行简单的实验切换。作为首批示例，我们展示了以下原位测量结果：（1）在蓝宝石上外延生长ZnO的原子层沉积过程中的X射线表面散射和反射率测量；（2）硅上MnO成核的掠入射小角散射；（3）在非晶ALD氧化铝和单晶蓝宝石上进行成核阶段Er2O3原子层沉积过程中的掠入射X射线吸收光谱。
