Dendooven Jolien, Solano Eduardo, Minjauw Matthias M, Van de Kerckhove Kevin, Coati Alessandro, Fonda Emiliano, Portale Giuseppe, Garreau Yves, Detavernier Christophe
Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France.
Rev Sci Instrum. 2016 Nov;87(11):113905. doi: 10.1063/1.4967711.
We report the design of a mobile setup for synchrotron based in situ studies during atomic layer processing. The system was designed to facilitate in situ grazing incidence small angle x-ray scattering (GISAXS), x-ray fluorescence (XRF), and x-ray absorption spectroscopy measurements at synchrotron facilities. The setup consists of a compact high vacuum pump-type reactor for atomic layer deposition (ALD). The presence of a remote radio frequency plasma source enables in situ experiments during both thermal as well as plasma-enhanced ALD. The system has been successfully installed at different beam line end stations at the European Synchrotron Radiation Facility and SOLEIL synchrotrons. Examples are discussed of in situ GISAXS and XRF measurements during thermal and plasma-enhanced ALD growth of ruthenium from RuO (ToRuS™, Air Liquide) and H or H plasma, providing insights in the nucleation behavior of these processes.
我们报告了一种用于原子层处理过程中基于同步加速器的原位研究的移动装置的设计。该系统旨在便于在同步加速器设施中进行原位掠入射小角X射线散射（GISAXS）、X射线荧光（XRF）和X射线吸收光谱测量。该装置由一个用于原子层沉积（ALD）的紧凑型高真空泵式反应器组成。远程射频等离子体源的存在使得在热ALD以及等离子体增强ALD过程中都能进行原位实验。该系统已成功安装在欧洲同步辐射装置和索莱伊同步加速器的不同光束线终端站。讨论了在由RuO（ToRuS™，液化空气公司）和H或H等离子体进行的钌的热ALD和等离子体增强ALD生长过程中原位GISAXS和XRF测量的示例，为这些过程的成核行为提供了见解。
