Bonakdar Alireza, Rezaei Mohsen, Dexheimer Eric, Mohseni Hooman
Bio-inspired Sensors and Optoelectronics Laboratory (BISOL), Department of Electrical Engineering and Computer Science, Northwestern University, Evanston, IL 60208, USA.
Nanotechnology. 2016 Jan 22;27(3):035301. doi: 10.1088/0957-4484/27/3/035301. Epub 2015 Dec 9.
In this paper, we present a low-cost and high-throughput nanofabrication method to realize metasurfaces that have selective absorption/emission in the mid-infrared region of the electromagnetic spectrum. We have developed DUV projection lithography to produce arbitrary patterns with sub-80 nm feature sizes. As examples of practical applications, we experimentally demonstrate structures with single and double spectral absorption/emission features, and in close agreement with numerical simulation. The fundamental mechanism of perfect absorption is discussed as well. Selective infrared absorbers/emitters are critical elements in realizing efficient thermophotovoltaic cells and high-performance biosensors.
