Yeo Jin-Ho, Lee Sung-Gap, Jo Ye-Won, Jung Hye-Rin
J Nanosci Nanotechnol. 2015 Nov;15(11):8642-6. doi: 10.1166/jnn.2015.11506.
We fabricated electrolyte-dielectric-metal (EDM) device incorporating a high-k Al2O3 sensing membrane from a porous anodic aluminum oxide (AAO) using a two step anodizing process for pH sensors. In order to change the properties of the AAO template, the crystallizing temperature was varied from 400 degrees C to 700 degrees C over 2 hours. The structural properties were observed by field emission scanning electron microscopy (FE-SEM). The pH sensitivity increased with an increase in the crystallizing temperature from 400 degrees C to 600 degrees C. However at 700 degrees C, deformation occurred. The porous AAO sensor with a crystallizing temperature of 600 degrees C displayed the good sensitivity and long-term stability and the values were 55.7 mV/pH and 0.16 mV/h, respectively.
我们采用两步阳极氧化工艺，从多孔阳极氧化铝（AAO）制备了包含高k值Al2O3传感膜的电解质-电介质-金属（EDM）器件，用于pH传感器。为了改变AAO模板的性能，在2小时内将结晶温度从400℃变化到700℃。通过场发射扫描电子显微镜（FE-SEM）观察结构性能。随着结晶温度从400℃升高到600℃，pH灵敏度增加。然而，在700℃时发生了变形。结晶温度为600℃的多孔AAO传感器显示出良好的灵敏度和长期稳定性，其值分别为55.7 mV/pH和0.16 mV/h。
