Kim J, Cui T
Mechanical Engineering Department, University of Minnesota, 111 Church Street SE, Minneapolis, Minnesota 55455, USA.
J Chem Phys. 2020 Aug 28;153(8):084701. doi: 10.1063/5.0012877.
In this paper, we investigate the substrate effect in graphene temperature sensors. Recently, there have been many research studies done on temperature sensors using the nanofabrication technique. However, the sensitivity and response time need to be improved. In this study, we propose a new type of temperature sensor that consists of graphene and Anodic Aluminum Oxide (AAO). In this device, graphene and AAO are used as the sensing material and the substrate, respectively. We characterize the sensitivity and the response time using the experimental results and simulation data. The real-time resistance change of graphene is monitored depending on the temperature, and the response time is also analyzed by COMSOL Multiphysics. To confirm the porous substrate effect, we compare the device performance of the AAO substrate to the performance of the glass substrate. From these results, the suspended graphene on the AAO substrate shows about two times higher sensitivity and a much faster response time than the glass substrate.
在本文中，我们研究了石墨烯温度传感器中的衬底效应。最近，利用纳米制造技术对温度传感器进行了许多研究。然而，灵敏度和响应时间仍有待提高。在本研究中，我们提出了一种新型温度传感器，它由石墨烯和阳极氧化铝（AAO）组成。在该器件中，石墨烯和AAO分别用作传感材料和衬底。我们利用实验结果和模拟数据对灵敏度和响应时间进行了表征。根据温度监测石墨烯的实时电阻变化，并通过COMSOL Multiphysics分析响应时间。为了确认多孔衬底效应，我们将AAO衬底的器件性能与玻璃衬底的性能进行了比较。从这些结果来看，AAO衬底上的悬浮石墨烯比玻璃衬底表现出约两倍的灵敏度和快得多的响应时间。
