Angotzi G N, Malerba M, Zucca S, Berdondini L
Annu Int Conf IEEE Eng Med Biol Soc. 2015 Aug;2015:877-80. doi: 10.1109/EMBC.2015.7318502.
The integration of implantable CMOS neural probes with thousands of simultaneously recording microelectrodes is a promising approach for neuroscience and might allow to literally image electrophysiological neuronal activity in multiple brain circuits as we have previously shown in vitro. Here, we present a complete system based on a fully multiplexed CMOS neural probe that was designed for in-vivo acute recordings with a scalable circuit architecture. In particular, a first prototype of a single-shaft probe with 512 electrodes was realized in a standard CMOS 0.18μm technology and post-processed to structure the shaft with a wedge-like geometry of 30μm in thickness at the tip and 80μm at the base. The design of the system and of the probe as well as the post-processing techniques are discussed. Finally, preliminary results on electrical, mechanical and implantation tests are presented to demonstrate the feasibility of our approach.
将具有数千个同时记录微电极的可植入CMOS神经探针集成在一起，对于神经科学来说是一种很有前景的方法，并且正如我们之前在体外所展示的那样，可能真的能够对多个脑回路中的电生理神经元活动进行成像。在此，我们展示了一个基于完全多路复用CMOS神经探针的完整系统，该系统采用可扩展电路架构设计用于体内急性记录。特别是，采用标准CMOS 0.18μm技术实现了一款具有512个电极的单轴探针的首个原型，并进行了后处理，以使轴具有楔形几何结构，尖端厚度为30μm，基部厚度为80μm。讨论了系统和探针的设计以及后处理技术。最后，给出了电气、机械和植入测试的初步结果，以证明我们方法的可行性。
