使用1×16电容式微机械超声换能器线性阵列的水下成像。
Underwater Imaging Using a 1 × 16 CMUT Linear Array.
作者信息
Zhang Rui, Zhang Wendong, He Changde, Zhang Yongmei, Song Jinlong, Xue Chenyang
机构信息
Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China.
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
出版信息
Sensors (Basel). 2016 Mar 1;16(3):312. doi: 10.3390/s16030312.
A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB (μPa·m/V) at 1 m. The -3 dB main beam width of the designed dense linear array is approximately 5 degrees. Synthetic aperture focusing technique was applied to improve the resolution of reconstructed images, with promising results. Thus, the proposed array was shown to be suitable for underwater imaging applications.
设计、制造并测试了一种1×16电容式微机械超声换能器线性阵列，用于低频范围内的水下成像。该线性阵列采用硅-绝缘体上硅（Si-SOI）键合技术制造。在水箱中测试了水下传输性能，该阵列的谐振频率为700 kHz，在1 m处的压力幅值为182 dB（μPa·m/V）。所设计的密集线性阵列的-3 dB主波束宽度约为5度。应用合成孔径聚焦技术提高重建图像的分辨率，取得了良好的效果。因此，所提出的阵列被证明适用于水下成像应用。
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