Zhang Tian, Zhang Wendong, Shao Xingling, Yang Yuhua, Wang Zhihao, Wu Yang, Pei Yu
State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
National Key Laboratory for Electronic Measurement Technology, School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
Micromachines (Basel). 2021 Jun 11;12(6):684. doi: 10.3390/mi12060684.
Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to reduce the number of active channels, this paper studies the grating lobes generated by CMUT periodic sparse array (PSA) pairs. Through the design of active element positions in the transmitting and receiving processes, the simulation results of effective aperture and beam patterns show that the common grating lobes (CGLs) generated by the transmit and receive array are eliminated. On the basis of point targets imaging, a CMUT linear array with 256 elements is used to carry out the PSA pairs experiment. Under the same sparse factor (SF), the optimal sparse array configuration can be selected to reduce the imaging artifacts. This conclusion is of great significance for the application of CMUT in three-dimensional ultrasound imaging.
电容式微机械超声换能器（CMUT）是一种基于微机电系统（MEMS）的超声换能器。CMUT元件很容易制成高密度阵列，这会增加硬件复杂度。为了减少有源通道的数量，本文研究了CMUT周期稀疏阵列（PSA）对产生的栅瓣。通过在发射和接收过程中对有源元件位置的设计，有效孔径和波束方向图的仿真结果表明，发射和接收阵列产生的公共栅瓣（CGL）被消除。在点目标成像的基础上，使用具有256个元件的CMUT线性阵列进行PSA对实验。在相同稀疏因子（SF）下，可以选择最优的稀疏阵列配置以减少成像伪影。这一结论对于CMUT在三维超声成像中的应用具有重要意义。
