Guo Hao, Tang Jun, Qian Kun, Tsoukalas Dimitris, Zhao Miaomiao, Yang Jiangtao, Zhang Binzhen, Chou Xiujian, Liu Jun, Xue Chenyang, Zhang Wendong
Science and Technology on Electronic Test &Measurement Laboratory, North University of China, Taiyuan, Shanxi, 030051, China.
Department of Applied Physics, National Technical University of Athens, GR-15780 Zografou, Greece.
Sci Rep. 2016 Mar 23;6:23606. doi: 10.1038/srep23606.
A vectorial strain gauge method using a single sensing element is reported based on the double-sided polydimethylsiloxane (PDMS) Fraunhofer diffraction gratings structures. Using O2 plasma treatment steps, orthogonal wrinkled gratings were fabricated on both sides of a pre-strained PDMS film. Diffracted laser spots from this structure have been used to experimentally demonstrate, that any applied strain can be quantitatively characterized in both the x and y directions with an error of less than 0.6% and with a gauge factor of approximately 10. This simple and low cost technology which is completely different from the traditional vectorial strain gauge method, can be applied to surface vectorial strain measurement and multi-axis integrated mechanical sensors.
报道了一种基于双面聚二甲基硅氧烷（PDMS）夫琅禾费衍射光栅结构的单传感元件矢量应变片方法。通过氧等离子体处理步骤，在预应变的PDMS薄膜两侧制备了正交皱纹光栅。利用该结构的衍射激光光斑进行实验证明，任何施加的应变都可以在x和y方向上进行定量表征，误差小于0.6%，应变片系数约为10。这种与传统矢量应变片方法完全不同的简单且低成本的技术，可应用于表面矢量应变测量和多轴集成机械传感器。
