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在柔性衬底上制造出机械坚固、截止频率为 39GHz 的石墨烯场效应晶体管。

Mechanically robust 39 GHz cut-off frequency graphene field effect transistors on flexible substrates.

机构信息

Institute of Electronics, Microelectronics and Nanotechnology, (IEMN) CNRS UMR8520, Villeneuve d'Ascq, cedex, France.

出版信息

Nanoscale. 2016 Aug 7;8(29):14097-103. doi: 10.1039/c6nr01521b. Epub 2016 Jul 11.

DOI:10.1039/c6nr01521b
PMID:27396243
Abstract

Graphene has been regarded as a promising candidate channel material for flexible devices operating at radio-frequency (RF). In this work we fabricated and fully characterized double bottom-gate graphene field effect transistors on flexible polymer substrates for high frequency applications. We report a record high as-measured current gain cut-off frequency (ft) of 39 GHz. The corresponding maximum oscillation frequency (fmax) is 13.5 GHz. These state of the art high frequency performances are stable against bending, with a typical variation of around 10%, for a bending radius of up to 12 mm. To demonstrate the reliability of our devices, we performed a fatigue stress test for RF-GFETs which were dynamically bend tested 1000 times at 1 Hz. The devices are mechanically robust, and performances are stable with typical variations of 15%. Finally we investigate thermal dissipation, which is a critical parameter for flexible electronics. We show that at the optimum polarization the normalized power dissipated by the GFETs is about 0.35 mW μm(-2) and that the substrate temperature is around 200 degree centigrade. At a higher power, irreversible degradations of the performances are observed. Our study on state of the art flexible GFETs demonstrates mechanical robustness and stability upon heating, two important elements to assess the potential of GFETs for flexible electronics.

摘要

石墨烯被认为是一种很有前途的候选沟道材料,可用于在射频 (RF) 频率下工作的柔性器件。在这项工作中,我们在柔性聚合物衬底上制造和全面表征了双底栅石墨烯场效应晶体管,用于高频应用。我们报告了高达 39GHz 的创纪录的实测电流增益截止频率 (ft)。相应的最大振荡频率 (fmax) 为 13.5GHz。这些最先进的高频性能在弯曲时是稳定的,对于弯曲半径高达 12mm 的情况,典型的变化约为 10%。为了证明我们的器件的可靠性,我们对 RF-GFET 进行了疲劳应力测试,这些器件在 1Hz 下进行了 1000 次动态弯曲测试。器件具有机械鲁棒性,性能稳定,典型变化为 15%。最后,我们研究了热耗散,这是柔性电子学的一个关键参数。我们表明,在最佳极化下,GFET 消耗的归一化功率约为 0.35mWμm(-2),衬底温度约为 200 摄氏度。在更高的功率下,观察到性能的不可逆退化。我们对最先进的柔性 GFET 的研究表明,在加热时具有机械鲁棒性和稳定性,这是评估 GFET 用于柔性电子学的潜力的两个重要因素。

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