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CVD 石墨烯射频晶体管中 200GHz 的最大振荡频率。

200 GHz Maximum Oscillation Frequency in CVD Graphene Radio Frequency Transistors.

机构信息

Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Device Institute , Nanjing 210016, China.

Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Wuhan University , Wuhan 430072, China.

出版信息

ACS Appl Mater Interfaces. 2016 Oct 5;8(39):25645-25649. doi: 10.1021/acsami.6b05791. Epub 2016 Sep 26.

Abstract

Graphene is a promising candidate in analog electronics with projected operation frequency well into the terahertz range. In contrast to the intrinsic cutoff frequency (f) of 427 GHz, the maximum oscillation frequency (f) of graphene device still remains at low level, which severely limits its application in radio frequency amplifiers. Here, we develop a novel transfer method for chemical vapor deposition graphene, which can prevent graphene from organic contamination during the fabrication process of the devices. Using a self-aligned gate deposition process, the graphene transistor with 60 nm gate length exhibits a record high f of 106 and 200 GHz before and after de-embedding, respectively. This work defines a unique pathway to large-scale fabrication of high-performance graphene transistors, and holds significant potential for future application of graphene-based devices in ultra high frequency circuits.

摘要

石墨烯是模拟电子学中很有前途的候选材料,预计其工作频率可高达太赫兹范围。与内在截止频率 (f) 为 427GHz 相比,石墨烯器件的最高振荡频率 (f) 仍处于较低水平,这严重限制了其在射频放大器中的应用。在这里,我们开发了一种用于化学气相沉积石墨烯的新型转移方法,该方法可防止石墨烯在器件制造过程中受到有机污染。使用自对准栅极沉积工艺,栅长为 60nm 的石墨烯晶体管在去嵌入前后的记录最高 f 值分别为 106GHz 和 200GHz。这项工作为大规模制造高性能石墨烯晶体管定义了一条独特的途径,为基于石墨烯的器件在超高频率电路中的未来应用提供了巨大的潜力。

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