Pfeifer Hannes, Paraïso Taofiq, Zang Leyun, Painter Oskar
Opt Express. 2016 May 30;24(11):11407-19. doi: 10.1364/OE.24.011407.
We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V with an on-chip capacitor that was optimized to exert forces up to 1 µN at 10 V operation voltage. Optical resonance frequencies around 190 THz with Q-factors up to 2.2 × 10 place the structure in the well-resolved sideband regime with vacuum optomechanical coupling rates up to g/2π = 353 kHz. Tuning can be used, for instance, to overcome variation in the device-to-device acoustic resonance frequency due to fabrication errors, paving the way for optomechanical circuits consisting of arrays of optomechanical cavities.
我们展示了一种硅光机械纳米梁设计，其具有在10.2 GHz处动态可调的声学模式。通过一个片上电容器，共振频率可以以90 kHz/V的速率进行偏移，该片上电容器经过优化，在10 V工作电压下可施加高达1 µN的力。光学共振频率约为190 THz，品质因数高达2.2×10，这使得该结构处于分辨良好的边带区域，真空光机械耦合率高达g/2π = 353 kHz。例如，调谐可用于克服由于制造误差导致的器件间声学共振频率的变化，为光机械腔阵列组成的光机械电路铺平道路。
