Department of Physics, Faculty of Science and Technology, Thammasat University , Pathum Thani, Thailand.
School of Electrical and Electronic Engineering, Chung-Ang University , Seoul, Korea.
ACS Appl Mater Interfaces. 2016 Aug 10;8(31):20192-9. doi: 10.1021/acsami.6b05724. Epub 2016 Jul 27.
We report on highly stable amorphous indium-gallium-zinc oxide (IGZO) gas sensors for ultraviolet (UV)-activated room-temperature detection of volatile organic compounds (VOCs). The IGZO sensors fabricated by a low-temperature photochemical activation process and exhibiting two orders higher photocurrent compared to conventional zinc oxide sensors, allowed high gas sensitivity against various VOCs even at room temperature. From a systematic analysis, it was found that by increasing the UV intensity, the gas sensitivity, response time, and recovery behavior of an IGZO sensor were strongly enhanced. In particular, under an UV intensity of 30 mW cm(-2), the IGZO sensor exhibited gas sensitivity, response time and recovery time of 37%, 37 and 53 s, respectively, against 750 ppm concentration of acetone gas. Moreover, the IGZO gas sensor had an excellent long-term stability showing around 6% variation in gas sensitivity over 70 days. These results strongly support a conclusion that a low-temperature solution-processed amorphous IGZO film can serve as a good candidate for room-temperature VOCs sensors for emerging wearable electronics.
我们报告了一种高度稳定的非晶态铟镓锌氧化物（IGZO）气体传感器，用于在室温下对挥发性有机化合物（VOC）进行紫外线（UV）激活检测。通过低温光化学激活工艺制造的 IGZO 传感器的光电流比传统的氧化锌传感器高两个数量级，即使在室温下，也能对各种 VOC 表现出高气体灵敏度。通过系统分析，我们发现通过增加 UV 强度，可以显著增强 IGZO 传感器的气体灵敏度、响应时间和恢复行为。特别是，在 30 mW cm(-2) 的 UV 强度下，IGZO 传感器对 750 ppm 浓度的丙酮气体表现出 37%的气体灵敏度、37 s 的响应时间和 53 s 的恢复时间。此外，IGZO 气体传感器具有出色的长期稳定性，在 70 天内气体灵敏度的变化约为 6%。这些结果有力地支持了一个结论，即低温溶液处理的非晶态 IGZO 薄膜可以作为新兴可穿戴电子产品中用于室温下 VOC 传感器的良好候选材料。
