Chen Hongxiang, Jiang Wei, Zhu Lianfeng, Yao Youwei
Advanced Materials Institute, Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China.
Sensors (Basel). 2017 May 24;17(6):1203. doi: 10.3390/s17061203.
Amorphous indium gallium zinc oxide (a-IGZO) powder was prepared by typical solution-based process and post-annealing process. The sample was used as sensor for detecting C₂H₅OH, H₂, and CO. Gas-sensing performance was found to be highly sensitive to C₂H₅OH gas in a wide range of concentration (0.5-1250 ppm) with the response of 2.0 towards 0.5 ppm and 89.2 towards 1250 ppm. Obvious difference of response towards C₂H₅OH, H₂, and CO was found that the response e.g., was 33.20, 6.64, and 2.84 respectively at the concentration of 200 ppm. The response time and recovery time of was 32 s and 14 s respectively towards 200 ppm concentration of C₂H₅OH gas under heating voltage of 6.5 V.
采用典型的溶液法和退火后处理工艺制备了非晶铟镓锌氧化物（a-IGZO）粉末。该样品用作检测C₂H₅OH、H₂和CO的传感器。发现气敏性能对宽浓度范围（0.5 - 1250 ppm）的C₂H₅OH气体高度敏感，对0.5 ppm的响应为2.0，对1250 ppm的响应为89.2。发现对C₂H₅OH、H₂和CO的响应存在明显差异，例如在200 ppm浓度下，响应分别为33.20、6.64和2.84。在6.5 V加热电压下，对200 ppm浓度的C₂H₅OH气体的响应时间和恢复时间分别为32 s和14 s。
