School of Mechanical and Aerospace Engineering, Seoul National University, San 56-1, Daehak dong, Gwanak-gu, Seoul 151-742, Korea.
Nanotechnology. 2016 Oct 14;27(41):415402. doi: 10.1088/0957-4484/27/41/415402. Epub 2016 Sep 5.
Yttria-stabilized zirconia (YSZ) thin film electrolyte deposited by plasma enhanced atomic layer deposition (PEALD) was investigated. PEALD YSZ-based bi-layered thin film electrolyte was employed for thin film solid oxide fuel cells on nanoporous anodic aluminum oxide substrates, whose electrochemical performance was compared to the cell with sputtered YSZ-based electrolyte. The cell with PEALD YSZ electrolyte showed higher open circuit voltage (OCV) of 1.0 V and peak power density of 182 mW cm(-2) at 450 °C compared to the one with sputtered YSZ electrolyte(0.88 V(OCV), 70 mW cm(-2)(peak power density)). High OCV and high power density of the cell with PEALD YSZ-based electrolyte is due to the reduction in ohmic and activation losses as well as the gas and electrical current tightness.
采用等离子体增强原子层沉积（PEALD）技术制备了钇稳定氧化锆（YSZ）薄膜电解质。在纳米多孔阳极氧化铝衬底上制备了基于 PEALD YSZ 的双层薄膜电解质的薄膜固体氧化物燃料电池，并将其电化学性能与溅射 YSZ 基电解质的电池进行了比较。与溅射 YSZ 电解质的电池（0.88 V（OCV），70 mW cm（-2）（峰值功率密度）相比，具有 PEALD YSZ 电解质的电池具有更高的开路电压（OCV）1.0 V 和在 450°C 时的峰值功率密度 182 mW cm（-2）。具有 PEALD YSZ 基电解质的电池具有高 OCV 和高功率密度，这是由于欧姆和活化损耗以及气体和电流密封性降低所致。
