Singh Neetesh, Casas-Bedoya Alvaro, Hudson Darren D, Read Andrew, Mägi Eric, Eggleton Benjamin J
Opt Lett. 2016 Dec 15;41(24):5776-5779. doi: 10.1364/OL.41.005776.
We demonstrate a compact silicon-on-sapphire (SOS) strip waveguide sensor for mid-IR absorption spectroscopy. This device can be used for gas and liquid sensing, especially to detect chemically similar molecules and precisely characterize extremely absorptive liquids that are difficult to detect by conventional infrared transmission techniques. We reliably measure concentrations up to 0.25% of heavy water (DO) in a DO-HO mixture at its maximum absorption band at around 4 μm. This complementary metal-oxide-semiconductor (CMOS) compatible SOS DO sensor is promising for applications such as measuring body fat content or detection of coolant leakage in nuclear reactors.
我们展示了一种用于中红外吸收光谱的紧凑型蓝宝石上硅(SOS)条形波导传感器。该设备可用于气体和液体传感,特别是用于检测化学性质相似的分子,并精确表征传统红外传输技术难以检测的高吸收性液体。我们在重水(D₂O)-水(H₂O)混合物位于约4μm的最大吸收带处,可靠地测量了浓度高达0.25%的重水。这种与互补金属氧化物半导体(CMOS)兼容的SOS重水传感器在测量人体脂肪含量或检测核反应堆中冷却剂泄漏等应用方面具有广阔前景。