Jin Tiening, Zhou Junchao, Lin Pao Tai
Department of Electrical and Computer Engineering, Texas A&M University, College Station, Texas 77843, USA.
Department of Materials Science and Engineering, Texas A&M University, College Station, Texas 77843, USA.
RSC Adv. 2020;10(13):7452-7459. doi: 10.1039/c9ra10058j. Epub 2020 Feb 19.
A chip-scale mid-infrared (mid-IR) sensor was developed for hydrocarbon gas detection. The sensor consisted of amorphous Si (a-Si) optical ridge waveguides that were fabricated by complementary metal-oxide-semiconductor (CMOS) processes. The waveguide exhibited a sharp fundamental mode through = 2.70 to 3.50 μm. Its sensing performance was characterized by measuring methane and acetylene. From the spectral mode attenuation, the characteristic C-H absorption bands associated with methane and acetylene were found at = 3.29-3.33 μm and = 3.00-3.06 μm, respectively. In addition, real-time methane and acetylene concentration monitoring was demonstrated at = 3.02 and 3.32 μm. Hence, the mid-IR waveguide sensor enabled an accurate and instantaneous analysis of hydrocarbon gas mixtures.
开发了一种用于烃类气体检测的芯片级中红外（mid-IR）传感器。该传感器由通过互补金属氧化物半导体（CMOS）工艺制造的非晶硅（a-Si）光波导组成。该光波导在波长为2.70至3.50μm范围内呈现出尖锐的基模。通过测量甲烷和乙炔来表征其传感性能。从光谱模式衰减中发现，与甲烷和乙炔相关的特征性C-H吸收带分别位于波长为3.29 - 3.33μm和3.00 - 3.06μm处。此外，还展示了在波长为3.02和3.32μm处对甲烷和乙炔浓度的实时监测。因此，中红外光波导传感器能够对烃类气体混合物进行准确和即时的分析。
