Crucialtec Co., LTD , Seongnam-si , Gyeonggi-do 13486 , South Korea.
Anal Chem. 2018 Apr 3;90(7):4348-4353. doi: 10.1021/acs.analchem.7b03599. Epub 2018 Mar 15.
Real-time gas analysis on-a-chip was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures for the microcavity were made of ultrathin silicate membranes embedded in a silicon chip using the complementary metal-oxide-semiconductor (CMOS) process. Fourier transform infrared spectroscopy (FTIR) shows that the silicate membrane is transparent in the range of 2.5-6.0 μm, a region that overlaps with multiple characteristic gas absorption lines and therefore enables gas detection applications. A test station integrating a mid-IR tunable laser, a microgas delivery system, and a mid-IR camera was assembled to evaluate the gas detection performance. CH, CO, and NO were selected as analytes due to their strong absorption bands at λ = 3.25-3.50, 4.20-4.35, and 4.40-4.65 μm, which correspond to C-H, C-O, and O-N stretching, respectively. A short subsecond response time and high gas identification accuracy were achieved. Therefore, our chip-scale mid-IR sensor provides a new platform for an in situ, remote, and embedded gas monitoring system.
利用中红外（mid-IR）微腔实现了实时气体分析。微腔的光学孔径由嵌入硅片的超薄硅酸盐膜制成，采用互补金属氧化物半导体（CMOS）工艺。傅里叶变换红外光谱（FTIR）表明，硅酸盐膜在 2.5-6.0μm 范围内是透明的，该区域与多个特征气体吸收线重叠，因此能够实现气体检测应用。组装了一个集成中红外可调谐激光器、微气体输送系统和中红外相机的测试台，以评估气体检测性能。由于它们在 λ = 3.25-3.50、4.20-4.35 和 4.40-4.65μm 处的强吸收带分别对应于 C-H、C-O 和 O-N 伸缩，因此选择 CH、CO 和 NO 作为分析物。实现了短至几秒钟的响应时间和高气体识别精度。因此，我们的芯片级中红外传感器为原位、远程和嵌入式气体监测系统提供了一个新平台。
