Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China.
College of Physics, Optoelectronics and Energy, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China.
Adv Mater. 2016 Dec;28(47):10353-10380. doi: 10.1002/adma.201601801. Epub 2016 Nov 7.
Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic structures on flexible materials, providing an increasingly popular strategy to control the light harvesting in the optoelectronic devices of photovoltaics, and in organic and inorganic light-emitting diodes. Here, the current status of nanopatterning technologies for the fabrication of optoelectronic devices is summarized. Scalable nanopatterning technologies for nanomanufacturing on flexible materials are emphasized. Critical challenges in various patterning techniques when considering the resolution, scalability, processing throughput, and the use of masks and resists are addressed. The integration of flexible nanopatterned substrates with light manipulation in organic optoelectronic devices is also discussed; this enables the control of light flux and spectra. Finally, potential development directions are highlighted.
连续且可扩展的柔性衬底上纳米图案化对于商业和科学兴趣都非常重要，但传统的光刻工艺很难实现。最近在纳米制造方法学方面的进展使得可以在柔性材料上用光导结构来进行光管理，为控制光伏、有机和无机发光二极管等光电设备中的光捕获提供了一种越来越受欢迎的策略。本文总结了用于光电设备制造的纳米图案化技术的现状。强调了用于柔性材料纳米制造的可扩展纳米图案化技术。讨论了各种图案化技术在分辨率、可扩展性、处理速度以及掩模和抗蚀剂使用方面的关键挑战。还讨论了将具有光控功能的柔性纳米图案化衬底与有机光电设备集成，这可以控制光通量和光谱。最后，突出了潜在的发展方向。
