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二维层状半导体 MoS-MoSe 范德瓦尔斯异质结构的面内镶嵌型大面积外延生长及其光电探测器应用

In-Plane Mosaic Potential Growth of Large-Area 2D Layered Semiconductors MoS-MoSe Lateral Heterostructures and Photodetector Application.

机构信息

Key Lab of Microsystem and Microstructure of Ministry of Education, Harbin Institute of Technology , Harbin 150080, China.

Department of Physics, Harbin Institute of Technology , Harbin 150080, China.

出版信息

ACS Appl Mater Interfaces. 2017 Jan 18;9(2):1684-1691. doi: 10.1021/acsami.6b13379. Epub 2017 Jan 6.

Abstract

Considering the unique layered structure and novel optoelectronic properties of individual MoS and MoSe, as well as the quantum coherence or donor-acceptor coupling effects between these two components, rational design and artificial growth of in-plane mosaic MoS/MoSe lateral heterojunctions film on conventional amorphous SiO/Si substrate are in high demand. In this article, large-area, uniform, high-quality mosaic MoS/MoSe lateral heterojunctions film was successfully grown on SiO/Si substrate for the first time by chemical vapor deposition (CVD) technique. MoSe film was grown along MoS triangle edges and occupied the blanks of the substrate, finally leading to the formation of mosaic MoS/MoSe lateral heterojunctions film. The composition and microstructure of mosaic MoS/MoSe lateral heterojunctions film were characterized by various analytic techniques. Photodetectors based on mosaic MoS/MoSe lateral heterojunctions film, triangular MoS monolayer, and multilayer MoSe film are systematically investigated. The mosaic MoS/MoSe lateral heterojunctions film photodetector exhibited optimal photoresponse performance, giving rise to responsivity, detectivity, and external quantum efficiency (EQE) up to 1.3 A W, 2.6 × 10 Jones, and 263.1%, respectively, under the bias voltage of 5 V with 0.29 mW cm (610 nm), possibly due to the matched band alignment of MoS and MoSe and strong donor-acceptor delocalization effect between them. Taking into account the similar edge conditions of transition metal dichalcogenides (TMDCs), such a facile and reliable approach might open up a unique route for preparing other 2D mosaic lateral heterojunctions films in a manipulative manner. Furthermore, the mosaic lateral heterojunctions film like MoS/MoSe in the present work will be a promising candidate for optoelectronic fields.

摘要

考虑到 MoS 和 MoSe 各自独特的层状结构和新颖的光电性能,以及这两种材料之间的量子相干或施主-受主耦合效应,在常规非晶硅/Si 衬底上实现平面内镶嵌 MoS/MoSe 横向异质结薄膜的合理设计和人工生长具有很高的需求。在本文中,首次通过化学气相沉积(CVD)技术成功地在 SiO/Si 衬底上生长出大面积、均匀、高质量的镶嵌 MoS/MoSe 横向异质结薄膜。MoSe 薄膜沿着 MoS 三角形边缘生长并占据了衬底的空白处,最终形成了镶嵌 MoS/MoSe 横向异质结薄膜。通过各种分析技术对镶嵌 MoS/MoSe 横向异质结薄膜的组成和微观结构进行了表征。系统地研究了基于镶嵌 MoS/MoSe 横向异质结薄膜、三角 MoS 单层和多层 MoSe 薄膜的光电探测器。在 5 V 的偏置电压下,镶嵌 MoS/MoSe 横向异质结薄膜光电探测器表现出最佳的光响应性能,响应率、探测率和外量子效率(EQE)分别高达 1.3 A W、2.6×10 琼斯和 263.1%,在 0.29 mW cm(610nm)下,这可能是由于 MoS 和 MoSe 的能带匹配以及它们之间的强施主-受主离域效应。考虑到过渡金属二卤化物(TMDCs)的类似边缘条件,这种简单可靠的方法可能为以可控方式制备其他二维镶嵌横向异质结薄膜开辟一条独特的途径。此外,本工作中类似 MoS/MoSe 的镶嵌横向异质结薄膜将是光电领域有前途的候选材料。

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