Jin Youliang, Song Baoan, Jia Zhitai, Zhang Yinan, Lin Changgui, Wang Xunsi, Dai Shixun
Opt Express. 2017 Jan 9;25(1):440-451. doi: 10.1364/OE.25.000440.
A tangencypoint method (TPM) is presented to derive the thickness and optical constants of chalcogenide thin films from their transmission spectra. It solves the problem of the abnormal value of thickness in the strong absorption region obtained by Swanepoel method. The accuracy of the thickness and refractive index is better than 0.5% by using this method. Moreover, comparing with Swanepoel method by using the same simulation and experimental data from the transmission spectrum, the accuracy of the thickness and refractive index obtained by the TPM is higher in the strong absorption region. Finally the dispersion and absorption coefficient of the chalcogenide films are obtained based on the experimental data of the transmission spectrum by using the TPM.
提出了一种切点法（TPM），用于从硫族化物薄膜的透射光谱中推导其厚度和光学常数。它解决了Swanepoel方法在强吸收区域获得的厚度异常值的问题。使用该方法，厚度和折射率的精度优于0.5%。此外，通过使用来自透射光谱的相同模拟和实验数据与Swanepoel方法进行比较，在强吸收区域，TPM获得的厚度和折射率的精度更高。最后，利用TPM基于透射光谱的实验数据获得了硫族化物薄膜的色散和吸收系数。
