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用于在任意波数下精确获取硫族化物薄膜折射率的Swanepoel方法的扩展。

Extension of the Swanepoel method for obtaining the refractive index of chalcogenide thin films accurately at an arbitrary wavenumber.

作者信息

Jin Youliang, Song Baoan, Lin Changgui, Zhang Peiqing, Dai Shixun, Xu TieFeng, Nie Qiuhua

出版信息

Opt Express. 2017 Dec 11;25(25):31273-31280. doi: 10.1364/OE.25.031273.

Abstract

The well-known Swanepoel method was often used to obtain the refractive index (RI) of thin films at the wavenumber values corresponding to the extremes of the transmission interference fringes. But it is difficult to accurately obtain the RI of chalcogenide thin films, especially at an arbitrary wavenumber. So a regional approach method (RAM) was presented here to extend the Swanepoel method to an arbitrary wavenumber. In the RAM the RI at the arbitrary wavenumber was determined through dynamic matching. The calculated values were used to match the experimental transmittance. The accuracy of the RI is better than 0.5%. The RI of a well-known film was obtained by the RAM. And the results are in great agreement with the true values of the RI of the film which indicates the correctness and effectiveness of the RAM. Moreover, the transmission spectrum of Ge-Sb-Se film was measured in the ultra-broadband range of 2000-18000 cm (555-5000 nm), and finally the RI of the film was obtained at the 22 wavenumbers of the spacer 600 cm by the RAM.

摘要

著名的斯瓦内普尔方法常用于在与透射干涉条纹极值对应的波数处获取薄膜的折射率(RI)。但要准确获得硫属化物薄膜的折射率很困难,尤其是在任意波数下。因此,这里提出了一种区域逼近法(RAM),将斯瓦内普尔方法扩展到任意波数。在区域逼近法中,通过动态匹配确定任意波数处的折射率。计算值用于匹配实验透射率。折射率的精度优于0.5%。通过区域逼近法获得了一种知名薄膜的折射率。结果与该薄膜折射率的真实值高度吻合,这表明了区域逼近法的正确性和有效性。此外,在2000 - 18000 cm(555 - 5000 nm)的超宽带范围内测量了Ge - Sb - Se薄膜的透射光谱,最后通过区域逼近法在间隔600 cm的22个波数处获得了该薄膜的折射率。

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