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在微流控硅芯片上集成的流体分散二维材料的动态原位传感。

Dynamic in-situ sensing of fluid-dispersed 2D materials integrated on microfluidic Si chip.

机构信息

Department of Engineering and Centre for Graphene Science, College of Engineering, Mathematics and Physical Sciences, University of Exeter, Exeter, EX4 4QF, UK.

EPSRC Centre for Doctoral Training in Electromagnetic Metamaterials, University of Exeter, EX4 4QL, UK.

出版信息

Sci Rep. 2017 Feb 10;7:42120. doi: 10.1038/srep42120.

Abstract

In this work, we propose a novel approach for wafer-scale integration of 2D materials on CMOS photonic chip utilising methods of synthetic chemistry and microfluidics technology. We have successfully demonstrated that this approach can be used for integration of any fluid-dispersed 2D nano-objects on silicon-on-insulator photonics platform. We demonstrate for the first time that the design of an optofluidic waveguide system can be optimised to enable simultaneous in-situ Raman spectroscopy monitoring of 2D dispersed flakes during the device operation. Moreover, for the first time, we have successfully demonstrated the possibility of label-free 2D flake detection via selective enhancement of the Stokes Raman signal at specific wavelengths. We discovered an ultra-high signal sensitivity to the xyz alignment of 2D flakes within the optofluidic waveguide. This in turn enables precise in-situ alignment detection, for the first practicable realisation of 3D photonic microstructure shaping based on 2D-fluid composites and CMOS photonics platform, while also representing a useful technological tool for the control of liquid phase deposition of 2D materials.

摘要

在这项工作中,我们提出了一种利用合成化学和微流控技术将二维材料晶圆级集成到 CMOS 光子芯片上的新方法。我们已经成功地证明,这种方法可用于将任何分散在流体中的二维纳米物体集成到绝缘体上硅光子平台上。我们首次证明,优化光流波导系统的设计可以实现在器件运行过程中同时进行原位拉曼光谱监测二维分散薄片。此外,我们首次成功地证明了通过选择性增强特定波长的斯托克斯拉曼信号来实现无标记二维薄片检测的可能性。我们发现,在光流波导中,二维薄片的 xyz 对准具有超高的信号灵敏度。这反过来又能够实现精确的原位对准检测,首次实现了基于二维-流体复合材料和 CMOS 光子平台的 3D 光子微结构成型,同时也为控制二维材料的液相沉积提供了有用的技术工具。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a906/5301493/e103fd99439c/srep42120-f1.jpg

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