Wall Thomas A, Chu Roger P, Parks Joshua W, Ozcelik Damla, Schmidt Holger, Hawkins Aaron R
Brigham Young University, Electrical and Computer Engineering, 459 Clyde Building, Provo, Utah 84602, United States.
University of California, Santa Cruz, Baskin Engineering, Room 40, 1156 High Street, Santa Cruz, California 95064, United States.
Opt Eng. 2016 Apr;55(4). doi: 10.1117/1.OE.55.4.040501. Epub 2016 Apr 25.
Ridge and buried channel waveguides (BCWs) made using plasma-enhanced chemical vapor deposition SiO were fabricated and tested after being subjected to long 85°C water baths. The water bath was used to investigate the effects of any water absorption in the ridge and BCWs. Optical mode spreading and power throughput were measured over a period of three weeks. The ridge waveguides quickly absorbed water within the critical guiding portion of the waveguide. This caused a nonuniformity in the refractive index profile, leading to poor modal confinement after only seven days. The BCWs possessed a low index top cladding layer of SiO, which caused an increase in the longevity of the waveguides, and after 21 days, the BCW samples still maintained ~20% throughput, much higher than the ridge waveguides, which had a throughput under 5%.
采用等离子体增强化学气相沉积法制备的SiO脊形和掩埋通道波导（BCW），在经过长时间85°C水浴后进行了制造和测试。水浴用于研究脊形和BCW中任何吸水的影响。在三周的时间内测量了光模扩展和功率通量。脊形波导在波导的关键导光部分迅速吸水。这导致了折射率分布的不均匀，仅七天后就导致了模式限制不佳。BCW具有低折射率的SiO顶部包层，这使得波导的寿命增加，21天后，BCW样品仍保持约20%的通量，远高于通量低于5%的脊形波导。
