Wall Thomas, Hammon Steven, Hamilton Erik, Zacheu Gabriel, Orfila Marcos, Schmidt Holger, Hawkins Aaron R
Department of Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602 USA.
School of Engineering, University of Californnia at Santa Cruz, Santa Cruz, CA 95064 USA.
IEEE Photonics Technol Lett. 2017 May 15;29(10):806-809. doi: 10.1109/LPT.2017.2686354. Epub 2017 Mar 22.
Water absorption was studied in two types of waveguides made from unannealed plasma enhanced chemical vapor deposition (PECVD) SiO. Standard rib anti-resonant reflecting optical waveguides (ARROWs) were fabricated with thin films of different intrinsic stress and indices of refraction. Buried ARROWs (bARROWs) with low and high refractive index differences between the core and cladding regions were also fabricated from the same types of PECVD films. All waveguides were subjected to a heated, high humidity environment and their optical throughput was tested over time. Due to water absorption in the SiO films, the optical throughput of all of the ARROWs decreased with time spent in the wet environment. The ARROWs with the lowest stress SiO had the slowest rate of throughput change. High index difference bARROWs showed no decrease in optical throughput after 40 days in the wet environment and are presented as a solution for environmentally stable waveguides made from unannealed PECVD SiO.
研究了由未退火的等离子体增强化学气相沉积（PECVD）SiO制成的两种类型波导中的吸水情况。采用具有不同固有应力和折射率的薄膜制备了标准肋形反谐振反射光波导（ARROW）。还使用相同类型的PECVD薄膜制备了纤芯和包层区域之间具有低折射率差和高折射率差的掩埋式ARROW（bARROW）。所有波导都置于高温高湿环境中，并随时间测试其光通量。由于SiO薄膜中的吸水现象，所有ARROW的光通量都随着在潮湿环境中停留的时间而降低。应力最低的SiO制成的ARROW光通量变化速率最慢。高折射率差的bARROW在潮湿环境中放置40天后光通量没有下降，被视为由未退火的PECVD SiO制成的环境稳定波导的一种解决方案。
