Wall Thomas, McMurray Johnny, Meena Gopikrishnan, Ganjalizadeh Vahid, Schmidt Holger, Hawkins Aaron R
Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602, USA.
Baskin School of Engineering, University of California, Santa Cruz, Santa Cruz, CA 95064, USA.
Micromachines (Basel). 2017 Aug;8(8). doi: 10.3390/mi8080252. Epub 2017 Aug 17.
Optofluidic, lab-on-a-chip fluorescence sensors were fabricated using buried anti-resonant reflecting optical waveguides (bARROWs). The bARROWs are impervious to the negative water absorption effects that typically occur in waveguides made using hygroscopic, plasma-enhanced chemical vapor deposition (PECVD) oxides. These sensors were used to detect fluorescent microbeads and had an average signal-to-noise ratio (SNR) that was 81.3% higher than that of single-oxide ARROW fluorescence sensors. While the single-oxide ARROW sensors were annealed at 300 °C to drive moisture out of the waveguides, the bARROW sensors required no annealing process to obtain a high SNR.
采用掩埋式抗共振反射光波导（bARROWs）制造了光流体芯片实验室荧光传感器。bARROWs不受通常在使用吸湿性等离子体增强化学气相沉积（PECVD）氧化物制成的波导中出现的负吸水效应的影响。这些传感器用于检测荧光微珠，其平均信噪比（SNR）比单氧化物ARROW荧光传感器高81.3%。虽然单氧化物ARROW传感器在300°C下退火以驱出波导中的水分，但bARROW传感器无需退火过程即可获得高信噪比。
