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平面内 2H-1T' MoTe 同质结的通量控制相工程合成。

In-Plane 2H-1T' MoTe Homojunctions Synthesized by Flux-Controlled Phase Engineering.

机构信息

Department of Chemistry, University of Minnesota, Minneapolis, MN, 55455, USA.

Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, 55455, USA.

出版信息

Adv Mater. 2017 Apr;29(16). doi: 10.1002/adma.201605461. Epub 2017 Feb 21.

Abstract

The fabrication of in-plane 2H-1T' MoTe homojunctions by the flux-controlled, phase-engineering of few-layer MoTe from Mo nanoislands is reported. The phase of few-layer MoTe is controlled by simply changing Te atomic flux controlled by the temperature of the reaction vessel. Few-layer 2H MoTe is formed with high Te flux, while few-layer 1T' MoTe is obtained with low Te flux. With medium flux, few-layer in-plane 2H-1T' MoTe homojunctions are synthesized. As-synthesized MoTe is characterized by Raman spectroscopy and X-ray photoelectron spectroscopy. Kelvin probe force microscopy and Raman mapping confirm that in-plane 2H-1T' MoTe homojunctions have abrupt interfaces between 2H and 1T' MoTe domains, possessing a potential difference of about 100 mV. It is further shown that this method can be extended to create patterned metal-semiconductor junctions in MoTe in a two-step lithographic synthesis. The flux-controlled phase engineering method could be utilized for the large-scale controlled fabrication of 2D metal-semiconductor junctions for next-generation electronic and optoelectronic devices.

摘要

本文报道了通过在由 Mo 纳米岛组成的少层 MoTe 中进行通量控制的相工程,制备面内 2H-1T' MoTe 同质结。通过简单地改变由反应容器温度控制的 Te 原子通量,来控制少层 MoTe 的相。高 Te 通量下形成少层 2H MoTe,而低 Te 通量下得到少层 1T' MoTe。中等通量下,合成了面内 2H-1T' MoTe 同质结。通过拉曼光谱和 X 射线光电子能谱对合成的 MoTe 进行了表征。Kelvin 探针力显微镜和拉曼映射证实,面内 2H-1T' MoTe 同质结在 2H 和 1T' MoTe 畴之间具有陡峭的界面,具有约 100 mV 的势差。进一步表明,该方法可以扩展到两步光刻合成中在 MoTe 中创建图案化的金属-半导体结。通量控制的相工程方法可用于大规模控制 2D 金属-半导体结的制造,以用于下一代电子和光电子器件。

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