An advanced phase retrieval algorithm in N-step phase-shifting interferometry with unknown phase shifts.

In phase-shifting interferometry with unknown phase shifts, a normalization and orthogonalization phase-shifting algorithm (NOPSA) is proposed to achieve phase retrieval. The background of interferogram is eliminated through using the orthogonality of complex sinusoidal function; and the influence of phase shifts deviation on accuracy of phase retrieval is avoided through both normalization and orthogonalization processing. Compared with the current algorithms with unknown phase shifts, the proposed algorithm reveals significantly faster computation speed, higher accuracy, better stability and non-sensitivity of phase shifts deviation.