Vidor Fábio F, Meyers Thorsten, Hilleringmann Ulrich
Sensor Technology Department, Paderborn University, 33098 Paderborn, NRW, Germany.
Nanomaterials (Basel). 2016 Aug 23;6(9):154. doi: 10.3390/nano6090154.
Innovative systems exploring the flexibility and the transparency of modern semiconducting materials are being widely researched by the scientific community and by several companies. For a low-cost production and large surface area applications, thin-film transistors (TFTs) are the key elements driving the system currents. In order to maintain a cost efficient integration process, solution based materials are used as they show an outstanding tradeoff between cost and system complexity. In this paper, we discuss the integration process of ZnO nanoparticle TFTs using a high- resin as gate dielectric. The performance in dependence on the transistor structure has been investigated, and inverted staggered setups depict an improved performance over the coplanar device increasing both the field-effect mobility and the / ratio. Aiming at the evaluation of the TFT characteristics for digital circuit applications, inverter circuits using a load TFT in the pull-up network and an active TFT in the pull-down network were integrated. The inverters show reasonable switching characteristics and / gains. Conjointly, the influence of the geometry ratio and the supply voltage on the devices have been analyzed. Moreover, as all integration steps are suitable to polymeric templates, the fabrication process is fully compatible to flexible substrates.
科学界和几家公司正在广泛研究探索现代半导体材料的灵活性和透明度的创新系统。对于低成本生产和大面积应用，薄膜晶体管（TFT）是驱动系统电流的关键元件。为了保持具有成本效益的集成过程，使用基于溶液的材料，因为它们在成本和系统复杂性之间表现出出色的权衡。在本文中，我们讨论了使用高树脂作为栅极电介质的ZnO纳米颗粒TFT的集成过程。研究了取决于晶体管结构的性能，并且反向交错设置比共面器件表现出更好的性能，提高了场效应迁移率和/比率。为了评估用于数字电路应用的TFT特性，集成了在上拉网络中使用负载TFT和在下拉网络中使用有源TFT的反相器电路。反相器显示出合理的开关特性和/增益。同时，分析了几何比率和电源电压对器件的影响。此外，由于所有集成步骤都适用于聚合物模板，因此制造过程与柔性基板完全兼容。
