Han Katherine, Chang Chih-Hung
School of Chemical, Biological, and Environmental Engineering, Oregon State University, Corvallis, OR 97331, USA.
Nanomaterials (Basel). 2014 Jan 29;4(1):87-128. doi: 10.3390/nano4010087.
This paper reviews the current progress in mathematical modeling of anti-reflective subwavelength structures. Methods covered include effective medium theory (EMT), finite-difference time-domain (FDTD), transfer matrix method (TMM), the Fourier modal method (FMM)/rigorous coupled-wave analysis (RCWA) and the finite element method (FEM). Time-based solutions to Maxwell's equations, such as FDTD, have the benefits of calculating reflectance for multiple wavelengths of light per simulation, but are computationally intensive. Space-discretized methods such as FDTD and FEM output field strength results over the whole geometry and are capable of modeling arbitrary shapes. Frequency-based solutions such as RCWA/FMM and FEM model one wavelength per simulation and are thus able to handle dispersion for regular geometries. Analytical approaches such as TMM are appropriate for very simple thin films. Initial disadvantages such as neglect of dispersion (FDTD), inaccuracy in TM polarization (RCWA), inability to model aperiodic gratings (RCWA), and inaccuracy with metallic materials (FDTD) have been overcome by most modern software. All rigorous numerical methods have accurately predicted the broadband reflection of ideal, graded-index anti-reflective subwavelength structures; ideal structures are tapered nanostructures with periods smaller than the wavelengths of light of interest and lengths that are at least a large portion of the wavelengths considered.
本文综述了抗反射亚波长结构数学建模的当前进展。涵盖的方法包括有效介质理论(EMT)、时域有限差分法(FDTD)、传输矩阵法(TMM)、傅里叶模态法(FMM)/严格耦合波分析(RCWA)和有限元法(FEM)。基于时间的麦克斯韦方程组解法,如FDTD,具有每次模拟可计算多个波长光的反射率的优点,但计算量很大。诸如FDTD和FEM之类的空间离散化方法在整个几何结构上输出场强结果,并且能够对任意形状进行建模。基于频率的解法,如RCWA/FMM和FEM每次模拟对一个波长进行建模,因此能够处理规则几何结构的色散。诸如TMM之类的解析方法适用于非常简单的薄膜。大多数现代软件已经克服了诸如忽略色散(FDTD)、TM偏振不准确(RCWA)、无法对非周期光栅建模(RCWA)以及对金属材料不准确(FDTD)等初始缺点。所有严格的数值方法都准确地预测了理想的渐变折射率抗反射亚波长结构的宽带反射;理想结构是周期小于感兴趣光波长且长度至少为所考虑波长很大一部分的锥形纳米结构。