利用等离子体技术提高非制冷红外探测器的响应度以实现高性能红外光谱分析

Enhancing the Responsivity of Uncooled Infrared Detectors Using Plasmonics for High-Performance Infrared Spectroscopy.

作者信息

Ahmed Amr Shebl, Kim Hye Jin, Kim Jinsik, Hwang Kyo Seon, Kim Seonghwan

机构信息

Department of Mechanical and Manufacturing Engineering, University of Calgary, Calgary, AB T2N 1N4, Canada.

Center for BioMicrosystems, Korea Institute of Science and Technology, Seoul 02792, Korea.

出版信息

Sensors (Basel). 2017 Apr 20;17(4):908. doi: 10.3390/s17040908.

DOI:10.3390/s17040908

PMID:28425964

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5426832/

Abstract

A lead zirconate titanate (PZT;Pb(Zr2Ti)O₃) layer embedded infrared (IR) detector decorated with wavelength-selective plasmonic crystals has been investigated for high-performance non-dispersive infrared (NDIR) spectroscopy. A plasmonic IR detector with an enhanced IR absorption band has been designed based on numerical simulations, fabricated by conventional microfabrication techniques, and characterized with a broadly tunable quantum cascade laser. The enhanced responsivity of the plasmonic IR detector at specific wavelength band has improved the performance of NDIR spectroscopy and pushed the limit of detection (LOD) by an order of magnitude. In this paper, a 13-fold enhancement in the LOD of a methane gas sensing using NDIR spectroscopy is demonstrated with the plasmonic IR detector.

摘要

一种嵌入有波长选择性等离子体晶体的锆钛酸铅（PZT；Pb(Zr₂Ti)O₃）层红外（IR）探测器已被用于高性能非色散红外（NDIR）光谱研究。基于数值模拟设计了一种具有增强红外吸收带的等离子体红外探测器，采用传统微加工技术制造，并使用宽可调谐量子级联激光器进行了表征。等离子体红外探测器在特定波段增强的响应率提高了NDIR光谱的性能，并将检测限（LOD）提高了一个数量级。本文展示了使用该等离子体红外探测器，通过NDIR光谱对甲烷气体传感的检测限提高了13倍。