Tan Xiaochao, Zhang Heng, Li Junyu, Wan Haowei, Guo Qiushi, Zhu Houbin, Liu Huan, Yi Fei
School of Optical and Electronic Information and Wuhan National Research Center for Optoelectronics (WNLO), Huazhong University of Science and Technology, Wuhan, 430074, China.
Department of Electrical Engineering, Yale University, New Haven, CT, 06511, USA.
Nat Commun. 2020 Oct 16;11(1):5245. doi: 10.1038/s41467-020-19085-1.
Non-dispersive infrared (NDIR) spectroscopy analyzes the concentration of target gases based on their characteristic infrared absorption. In conventional NDIR gas sensors, an infrared detector has to pair with a bandpass filter to select the target gas. However, multiplexed NDIR gas sensing requires multiple pairs of bandpass filters and detectors, which makes the sensor bulky and expensive. Here, we propose a multiplexed NDIR gas sensing platform consisting of a narrowband infrared detector array as read-out. By integrating plasmonic metamaterial absorbers with pyroelectric detectors at the pixel level, the detectors exhibit spectrally tunable and narrowband photoresponses, circumventing the need for separate bandpass filter arrays. We demonstrate the sensing of HS, CH, CO, CO, NO, CHO, NO, SO. The detection limits of common gases such as CH, CO, and CO are 63 ppm, 2 ppm, and 11 ppm, respectively. We also demonstrate the deduction of the concentrations of two target gases in a mixture.
非色散红外（NDIR）光谱法基于目标气体的特征红外吸收来分析其浓度。在传统的NDIR气体传感器中，红外探测器必须与带通滤波器配对以选择目标气体。然而，多路复用NDIR气体传感需要多对带通滤波器和探测器，这使得传感器体积庞大且昂贵。在此，我们提出了一种由窄带红外探测器阵列作为读出部件的多路复用NDIR气体传感平台。通过在像素级别将等离子体超材料吸收体与热释电探测器集成，探测器呈现出光谱可调谐的窄带光响应，从而无需单独的带通滤波器阵列。我们展示了对H₂S、CH₄、CO、CO₂、NO、C₂H₅OH、NO₂、SO₂的传感。CH₄、CO和CO₂等常见气体的检测限分别为63 ppm、2 ppm和11 ppm。我们还展示了对混合物中两种目标气体浓度的推导。
