Hsiao Chun-Ching, Luo Li-Siang
Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan.
Sensors (Basel). 2014 Jul 9;14(7):12219-32. doi: 10.3390/s140712219.
Zinc oxide (ZnO) is a low-toxicity and environmentally-friendly material applied on devices, sensors or actuators for "green" usage. A porous ZnO film deposited by a rapid process of aerosol deposition (AD) was employed as the gas-sensitive material in a CO gas sensor to reduce both manufacturing cost and time, and to further extend the AD application for a large-scale production. The relative resistance change (△R/R) of the ZnO gas sensor was used for gas measurement. The fabricated ZnO gas sensors were measured with operating temperatures ranging from 110 °C to 180 °C, and CO concentrations ranging from 100 ppm to 1000 ppm. The sensitivity and the response time presented good performance at increasing operating temperatures and CO concentrations. AD was successfully for applied for making ZnO gas sensors with great potential for achieving high deposition rates at low deposition temperatures, large-scale production and low cost.
氧化锌（ZnO）是一种低毒性且环保的材料，应用于设备、传感器或致动器以实现“绿色”用途。通过气溶胶沉积（AD）快速工艺沉积的多孔ZnO薄膜被用作CO气体传感器中的气敏材料，以降低制造成本和时间，并进一步扩展AD在大规模生产中的应用。ZnO气体传感器的相对电阻变化（△R/R）用于气体测量。所制备的ZnO气体传感器在110℃至180℃的工作温度以及100ppm至1000ppm的CO浓度范围内进行测量。在升高的工作温度和CO浓度下，灵敏度和响应时间表现出良好的性能。AD成功应用于制造具有在低沉积温度下实现高沉积速率、大规模生产和低成本巨大潜力的ZnO气体传感器。
