Max Planck Institute for Solid State Research, Heisenbergstrasse 1, 70569, Stuttgart, Germany.
Department of Chemistry, Ludwig-Maximilians-Universität (LMU), Butenandtstrasse 5-13, 81377, Munich, Germany.
Angew Chem Int Ed Engl. 2017 Jul 10;56(29):8389-8392. doi: 10.1002/anie.201703149. Epub 2017 Jun 20.
Harvesting the properties of nanosheets is not only crucial from a fundamental perspective, but also for the development of novel functional devices based on 2D nanosheets. Herein, we demonstrate the processing of organically modified TBA H Ca Nb O nanosheets into photonic thin films and study their colorimetric sensing properties in response to various aqueous and organic solvent vapors. Building on the enhanced solvent accessibility of TBA-containing nanosheets and their photocatalytic activity under UV irradiation, we develop a new concept for photocatalytic lithography using TBA H Ca Nb O nanosheets as a negative photoresist to obtain high-fidelity micron-scale patterns of robust inorganic nanosheets. Photocatalytic nanosheet lithography (PNL) therefore adds a new resist-free, resource efficient direct patterning technique to the toolbox of photolithography.
从基础研究的角度来看，获取纳米片的特性不仅至关重要，而且对于基于二维纳米片的新型功能器件的发展也同样重要。在此，我们展示了将有机改性的 TBA H Ca Nb O 纳米片加工成光子薄膜，并研究了它们对各种水相和有机溶液蒸气的比色传感性能。基于含 TBA 的纳米片增强的溶剂可及性及其在 UV 照射下的光催化活性，我们开发了一种使用 TBA H Ca Nb O 纳米片作为负性光致抗蚀剂的光催化光刻新概念，以获得高保真度的微米级坚固无机纳米片图案。因此，光催化纳米片光刻 (PNL) 为光刻工具箱增加了一种新的无掩模、资源高效的直接图案化技术。
