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在密封热分子运动系统中快速批量生产高质量石墨烯薄膜

Fast Batch Production of High-Quality Graphene Films in a Sealed Thermal Molecular Movement System.

作者信息

Xu Jianbao, Hu Junxiong, Li Qi, Wang Rubing, Li Weiwei, Guo Yufen, Zhu Yongbo, Liu Fengkui, Ullah Zaka, Dong Guocai, Zeng Zhongming, Liu Liwei

机构信息

Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou, 215123, P. R. China.

College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China.

出版信息

Small. 2017 Jul;13(27). doi: 10.1002/smll.201700651. Epub 2017 May 24.

Abstract

Chemical vapor deposition (CVD) growth of high-quality graphene has emerged as the most promising technique in terms of its integrated manufacturing. However, there lacks a controllable growth method for producing high-quality and a large-quantity graphene films, simultaneously, at a fast growth rate, regardless of roll-to-roll (R2R) or batch-to-batch (B2B) methods. Here, a stationary-atmospheric-pressure CVD (SAPCVD) system based on thermal molecular movement, which enables fast B2B growth of continuous and uniform graphene films on tens of stacked Cu(111) foils, with a growth rate of 1.5 µm s , is demonstrated. The monolayer graphene of batch production is found to nucleate from arrays of well-aligned domains, and the films possess few defects and exhibit high carrier mobility up to 6944 cm V s at room temperature. The results indicate that the SAPCVD system combined with single-domain Cu(111) substrates makes it possible to realize fast batch-growth of high-quality graphene films, which opens up enormous opportunities to use this unique 2D material for industrial device applications.

摘要

就集成制造而言,高质量石墨烯的化学气相沉积(CVD)生长已成为最具前景的技术。然而,目前缺乏一种可控的生长方法,能够以快速的生长速率同时生产高质量、大批量的石墨烯薄膜,无论是卷对卷(R2R)还是批对批(B2B)方法。在此,展示了一种基于热分子运动的常压化学气相沉积(SAPCVD)系统,该系统能够在数十个堆叠的Cu(111)箔上快速进行批对批生长连续且均匀的石墨烯薄膜,生长速率为1.5 µm/s。发现批量生产的单层石墨烯从排列良好的畴阵列中形核,并且薄膜几乎没有缺陷,在室温下具有高达6944 cm² V⁻¹ s⁻¹的高载流子迁移率。结果表明,SAPCVD系统与单畴Cu(111)衬底相结合,使得实现高质量石墨烯薄膜的快速批生长成为可能,这为将这种独特的二维材料用于工业器件应用开辟了巨大机遇。

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