Xu Jianbao, Hu Junxiong, Li Qi, Wang Rubing, Li Weiwei, Guo Yufen, Zhu Yongbo, Liu Fengkui, Ullah Zaka, Dong Guocai, Zeng Zhongming, Liu Liwei
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou, 215123, P. R. China.
College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China.
Small. 2017 Jul;13(27). doi: 10.1002/smll.201700651. Epub 2017 May 24.
Chemical vapor deposition (CVD) growth of high-quality graphene has emerged as the most promising technique in terms of its integrated manufacturing. However, there lacks a controllable growth method for producing high-quality and a large-quantity graphene films, simultaneously, at a fast growth rate, regardless of roll-to-roll (R2R) or batch-to-batch (B2B) methods. Here, a stationary-atmospheric-pressure CVD (SAPCVD) system based on thermal molecular movement, which enables fast B2B growth of continuous and uniform graphene films on tens of stacked Cu(111) foils, with a growth rate of 1.5 µm s , is demonstrated. The monolayer graphene of batch production is found to nucleate from arrays of well-aligned domains, and the films possess few defects and exhibit high carrier mobility up to 6944 cm V s at room temperature. The results indicate that the SAPCVD system combined with single-domain Cu(111) substrates makes it possible to realize fast batch-growth of high-quality graphene films, which opens up enormous opportunities to use this unique 2D material for industrial device applications.
就集成制造而言,高质量石墨烯的化学气相沉积(CVD)生长已成为最具前景的技术。然而,目前缺乏一种可控的生长方法,能够以快速的生长速率同时生产高质量、大批量的石墨烯薄膜,无论是卷对卷(R2R)还是批对批(B2B)方法。在此,展示了一种基于热分子运动的常压化学气相沉积(SAPCVD)系统,该系统能够在数十个堆叠的Cu(111)箔上快速进行批对批生长连续且均匀的石墨烯薄膜,生长速率为1.5 µm/s。发现批量生产的单层石墨烯从排列良好的畴阵列中形核,并且薄膜几乎没有缺陷,在室温下具有高达6944 cm² V⁻¹ s⁻¹的高载流子迁移率。结果表明,SAPCVD系统与单畴Cu(111)衬底相结合,使得实现高质量石墨烯薄膜的快速批生长成为可能,这为将这种独特的二维材料用于工业器件应用开辟了巨大机遇。