Sun Luzhao, Chen Buhang, Wang Wendong, Li Yanglizhi, Zeng Xiongzhi, Liu Haiyang, Liang Yu, Zhao Zhenyong, Cai Ali, Zhang Rui, Zhu Yeshu, Wang Yuechen, Song Yuqing, Ding Qingjie, Gao Xuan, Peng Hailin, Li Zhenyu, Lin Li, Liu Zhongfan
Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, P. R. China.
Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, P. R. China.
ACS Nano. 2022 Jan 25;16(1):285-294. doi: 10.1021/acsnano.1c06285. Epub 2021 Dec 29.
The epitaxial growth of single-crystal thin films relies on the availability of a single-crystal substrate and a strong interaction between epilayer and substrate. Previous studies have reported the roles of the substrate (.., symmetry and lattice constant) in determining the orientations of chemical vapor deposition (CVD)-grown graphene, and Cu(111) is considered as the most promising substrate for epitaxial growth of graphene single crystals. However, the roles of gas-phase reactants and graphene-substrate interaction in determining the graphene orientation are still unclear. Here, we find that trace amounts of oxygen is capable of enhancing the interaction between graphene edges and Cu(111) substrate and, therefore, eliminating the misoriented graphene domains in the nucleation stage. A modified anomalous grain growth method is developed to improve the size of the as-obtained Cu(111) single crystal, relying on strongly textured polycrystalline Cu foils. The batch-to-batch production of A3-size (∼0.42 × 0.3 m) single-crystal graphene films is achieved on Cu(111) foils relying on a self-designed pilot-scale CVD system. The as-grown graphene exhibits ultrahigh carrier mobilities of 68 000 cm V s at room temperature and 210 000 cm V s at 2.2 K. The findings and strategies provided in our work would accelerate the mass production of high-quality misorientation-free graphene films.
单晶薄膜的外延生长依赖于单晶衬底的可用性以及外延层与衬底之间的强相互作用。先前的研究报道了衬底(如对称性和晶格常数)在确定化学气相沉积(CVD)生长的石墨烯取向方面的作用,并且Cu(111)被认为是石墨烯单晶外延生长最有前景的衬底。然而,气相反应物和石墨烯 - 衬底相互作用在确定石墨烯取向方面的作用仍不清楚。在此,我们发现痕量的氧气能够增强石墨烯边缘与Cu(111)衬底之间的相互作用,因此,在成核阶段消除取向错误的石墨烯畴。开发了一种改进的异常晶粒生长方法,以依赖于强烈织构化的多晶铜箔来提高所获得的Cu(111)单晶的尺寸。依靠自行设计的中试规模CVD系统,在Cu(111)箔上实现了A3尺寸(约0.42×0.3 m)单晶石墨烯薄膜的批量生产。所生长的石墨烯在室温下表现出68000 cm² V⁻¹ s⁻¹的超高载流子迁移率,在2.2 K时为210000 cm² V⁻¹ s⁻¹。我们工作中提供的发现和策略将加速高质量无取向错误石墨烯薄膜的大规模生产。